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PerkinElmer

Semiconductor/Electronics

We provide an ICP-MS designed for maximum interference removal and superior BEC down to single-digit ppt.

PerkinElmer’s NexION? 350 ICP-MS spectrometers provide superior uptime and productivity through a variety of unique features that make them the analytical instruments of choice in the semiconductor industry. Enhanced signal stability, speed, and the lowest detection limits of any ICP-MS on the market are just some of the reasons why the NexION is the industry leader. Now consider that the NexION is designed for maximum interference removal and also offers the most advanced nanoparticle software for single particle analysis down to the sub-20 nanometer diameter, and you will know why NexION leads the ICP-MS pack.

Utilizing systems designed exclusively for the semiconductor market testing needs, all turnkey methods, as well as samples analyzed for customer's evaluation, are performed in our class 100 semiconductor clean rooms. These facilities allow us to anticipate the needs of the rigorous analysis that will be expected once installed in your facility. Our goal is to provide your laboratory with the analytical systems and appropriate support to help your laboratory obtain the lowest possible detection limits as rapidly and easily as possible.

PerkinElmer offers a full spectrum of instruments, products, and services for the semiconductor laboratory, including:

  • Atomic Spectroscopy (GFAAS, ICP-MS and ICP-OES)
  • Chromatography (Thermal Desorption, GC, GC/MS, HPLC/UHPLC)
  • Molecular Spectroscopy (FT-IR and UV-Vis)
  • Thermal and Elemental Analysis
  • Consumables
  • Service offerings, including turnkey maintenance agreements

Impurities Management

Determine ultra-trace metal contaminates during the manufacturing process of electronics and semiconductors using the NexION 350S ICP-MS.

  • The NexION 350S ICP-MS features a dual-channel Universal Cell that is optimized for sensitivity. The system uses pure reactive gases to remove all interferences with little or no loss of analyte sensitivity. It is ideal for applications that demand the very best performance and an unprecedented level of interference removal. In addition, the configuration of the NexION 350S ICP-MS is designed specifically to meet the needs of the semiconductor industry.

Determination of impurities in IPA using Automated Thermal Desorption-GC/MS.

  • The PerkinElmer Automated Thermal Desorption-GC/MS provides an ideal, complete, solution to detecting ultra-trace elements in Isopropyl Alcohol (IPA).

Easy determination and identification of impurities using the PerkinElmer Spotlight? 400 FT-IR Imaging System.

  • The PerkinElmer Spotlight? FT-IR provides the ability to measure impurities in semiconductors at ?, offering fast and effective quality control.

Components Quality

Safeguard the quality of a wide variety of semiconductor and other electronic materials using PerkinElmer materials characterization solutions.

Thermal analyzers are an essential tool in the semiconductor packaging industry. Not only are they important in the design and development phase, but they can also be used for failure analysis and quality control purposes.

PerkinElmer’s family of FT-IR spectrometers offers a full suite of solutions for the semiconductor industry. Knowledge of impurities like carbon, oxygen, boron, and phosphorus in wafers and cells is essential to the future manufacturing process and for cell efficiency. The concentration of these elements directly impacts the wafer fabrication process in the semiconducting layers and therefore influences reliability. Infrared spectroscopy (FT-IR) is used for this application because of its ability to visualize different types of bonding between atoms and their activity under very specific conditions.

PerkinElmer’s high-performance LAMBDA? UV/Vis/NIR spectrophotometers, accessories, and software are ideals choices for providing accurate measurement of key research parameters, such as band gap. This property is important for determining the quality of semiconducting elements used in the production of thin-film PV cells.

Workplace Safety and Material Outgassing

The PerkinElmer family of chromatographic systems provides complete solutions for the analysis of toxic chemicals in microchip fabrication plants (Fabs) and other semiconductor workplaces.

PerkinElmer also provides solutions for the analysis of toxic chemicals emitted from smokestacks using a variety of detectors, including thermal desorption coupled with GC/MS.The TurboMatrix ATD/GC/MS system is also ideal for measuring the toxic component in workplace air. Thermal desorption is a technique that simplifies and speeds a wide range of gas chromatography (GC) applications, including cleanroom air monitoring, and the analysis of outgassing from semiconductor materials, and polymers. The systems twin-walled oven design with concentric air exhaust allows the user to achieve greater separation at near-ambient temperatures without the use of special coolants, especially important for the analysis of Volatile Organic Compounds (VOCs) in Fab environmental monitoring.

Nanoscale Detection and Characterization

For improved QA/QC at the nanoscale, PerkinElmer offers a suite of analytical techniques. The NexION 350 equipped with the Syngistix? Nano Application Module is capable of identifying, counting, and sizing particles from sub-10 nanometers up to a few micrometers at the single particle level. The LAMBDA? 1050 UV/VIS with its diverse accessories offers insights to the surface chemistry.

Nanomaterials are used in the construction of polymer-based photovoltaic (PV) cells to aid the charge transfer from the light-sensitive organic material to the conducting layer of the solar cell.

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